Tetrafluoromethane 99.9% Compressed CF4 Gas for Semiconductor Industry 

Product Description 99.9% Hexafluoroethane NameHexafluoroethanePurity99.9%FormulaC2F6Molecular Weight138.01CAS NO.76-16-4EINECS No.200-939-8BrandHuate GasPlace of originGuangdong, ChinaDOT Shipping NameHexafluoroethane, compressedDOT Classification2.2DOT LabelNon-flammable GasUN NumberUN2193ColorColorlessOdorOdorless Specification Oxygen≤100 ppmvNitrogen≤400ppmvCarbon Dioxide≤80 ppmvCarbon Monoxide≤50 ppmvMethane≤50 ppmvOther Halocarbons≤100 ppmvWater≤10ppmvSulfur Hexafluoride≤15 ppmvAcidity as HF≤1.0 ppmv Packing & Delivery Cylinder TypeGB/ISO/DOTCylinder Size40L/44L/48.8L/50LCylinder ValveCGA660/DISS716 Recommend Products

High-purity Carbon Dioxide CO2 High-purity Carbon Monoxide CO High-purity Sulfur Hexafluoride SF6 High-purity Trifluoromethane CHF3